Thermal scanning probe lithography—a review

Thermal scanning probe lithography is reviewed in the context of material removal, conversion and deposition. Scanning probe lithography has long been a promising technique for direct-write nanoscale patterning on surfaces. However, while the technique is widely used in research labs, the slow write speed has limited its use in industrial settings. Instead, thermal scanning probe lithography has emerged, in which a heated tip is used to induce localized changes in the material, enabling write speeds limited by the speed of movement of the tip itself. A team from École Polytechnique Fédérale de Lausanne led by Juergen Brugger now reviews the current state of play for thermal scanning probe lithography, focusing on whether material is removed, changed or deposited by the heated tip, and the types of materials that have been studied.