MEMS Reliability.
image LMTS
Reliability and qualification methodology for MEMS.
Prof. Shea Herbert (LMTS - Microsystems for Space Technologies Laboratory) together with researchers from Wilmington, Massachusetts, report on how to design & manufacture MEMS components for reliability by focusing on basic tools such as reliability statistics, CAD methodologies, FMEA, tools & instruments for failure analysis, and product development methodologies.