LMIS1 at MNE 2023

© 2023 EPFL

© 2023 EPFL

LMIS1 recently participated to MNE2023 conference in Berlin, with one oral presentation by Berke Erbas.

This year, the 49th edition of MNE took place in Berlin, from September 25th to28th. Such a conference is the flagship event of the International Society for Micro- and Nanotechnology (iMNEs). It has always been the leading international conference for micro- and nano-fabrication, manufacturing techniques, as well as applications of the fabricated micro/nanostructures, devices and microsystems into electronics, photonics, energy, environment, chemistry and life sciences.

LMIS1 actively participated to MNE 2023 with one oral presentation by Berke Erbas, entitled "Combining Thermal Scanning Probe Lithography and Dry Etching for Amplifying Grayscale Nanopatterns in SiO2".