LMIS1 at Eurosensors 2026

© 2026 EPFL

© 2026 EPFL

Chenxiang Zhang and Tao Zhang showcased new fabrication and microfluidic approaches for next-generation sensing and biomedical microsystems.

At Eurosensors 2026, Chenxiang Zhang presented “All-Dry Dual-Stencil Lithography for IGZO Thin-Film Transducers,” introducing a fabrication approach that integrates IGZO transistor stacks using two sequentially aligned stencils, without photoresist or wet etching. With a maximum process temperature of 150 °C, the resulting devices demonstrated clear field-effect operation, low gate leakage, and minimal transfer hysteresis. A proof-of-concept white-light experiment also revealed a linear photocurrent response, illustrating their potential as optical transducers. The work supports the development of functional IGZO devices for sensor systems built on substrates sensitive to heat and liquid processing.

Tao Zhang presented “Microfluidic Synthesis of Piezoelectric-Magnetic Composite Microbeads for Wireless Neural Stimulation,” introducing a droplet-based microfluidic approach for fabricating functional composite microbeads. The method combines piezoelectric and magnetic materials within engineered microbeads, integrating materials engineering and microfabrication techniques. The work demonstrates a promising strategy for producing multifunctional microscale structures with potential applications in wireless neural stimulation.