J. Micromech. Microeng. 22 vol. 07 4012 (2012)

© 2012 EPFL
Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing.
Well-controlled spherical microstructures open new possibilities for several MEMS devices, such as hemispherical microfluidic channels or micro-optical elements. However, machining of micro-spherical shapes has proven to be difficult with conventional planar micro-fabrication processes. The group of Prof. Jürgen Brugger (Microsystems Laboratory 1) presents a fabrication method allowing the fabrication of controlled micro-spherical cap structures with defined edge angles.
L Jacot-Descombes et al 2012 J. Micromech. Microeng. 22 074012 doi:10.1088/0960-1317/22/7/074012