Grand Challenge in N/MEMS

Some MEMS-based products are a mature industry that delivers commodities for our everyday life, such as integrated multi sensor modules, actuators, communication components, and other transducers. The increasing impact that MEMS are having on markets is caused by their typically small size, which makes them minimally invasive into larger systems, and cost-efficient to produce, therefore facilitating their implementation in portable, ubiquitous electronics. However, current MEMS technologies will not be able to meet next decade’s society requirements in terms of performance, functionalities, power consumption, cost, and size.